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SN 268, Lens SN WFL046
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Manuf August, 1984
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Broadband "G" + "H" line system
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Resolution: 1.25 microns
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Alignment: Wafer Alignment System
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Size: 3", 4", 5", 6"
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Intelligent,Automation or Manual loader
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| * Status light assembly |
| * HP362 Computer Tower
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Ultratech Stepper Model 1100 HP362 System |
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| * Serial Number 746 |
* Manufactured July 1, 1991 |
* Broadband "G" + "H" line system |
* Resolution: 1.0 microns |
* Alignment: WAS key and target |
* Available Size: 3", 4", 5", 6" |
* Automation or Manual loader |
| * Air Probe Edge Switches |
| * HP 362 Computer w/ hard disk |
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Ultratech Stepper Model 1100 HP362 System |
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| * Serial Number 296W |
* Manufactured October 4, 1984 |
* Broadband "G" + "H" line system |
* Resolution: 1.0 microns |
* Alignment: WAS key and target |
* Available Size: 3", 4", 5", 6" |
* Automation or Intelligent Autoloader |
| * Air Probe Edge Switches |
| * HP 362 Computer w/ hard disk |
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Ultratech Stepper Model 1100 HP362 System |
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| * Serial Number 453 |
* Manufactured October 19, 1987 |
* Broadband "G" + "H" line system |
* Resolution: 1.0 microns |
* Alignment: WAS key and target |
* Available Size: 3", 4", 5", 6" |
* Automation or Intelligent Autoloader |
| * Air Probe Edge Switches |
| * HP 362 Computer w/ hard disk |
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Ultratech is a trademark of Ultratech Stepper Corporation |
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